JNQQEOHHHGGZCY-UHFFFAOYSA-N 0.000 claims description 5 JNQQEOHHHGGZCY-UHFFFAOYSA-N lithium oxygen(2-) tantalum(5+) Chemical compound.(=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 5 GQYHUHYESMUTHG-UHFFFAOYSA-N Lithium niobate Chemical compound.238000001514 detection method Methods 0.000 claims abstract description 31.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Fujitsu Media Devices Ltd filed Critical Fujitsu Media Devices Ltd Priority to JP2000143729A priority Critical patent/JP3838479B2/en Publication of JP2001324332A publication Critical patent/JP2001324332A/en Application granted granted Critical Publication of JP3838479B2 publication Critical patent/JP3838479B2/en Anticipated expiration legal-status Critical Status Expired - Fee Related legal-status Critical Current Links Original Assignee Fujitsu Media Devices Ltd Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Noboru Wakatsuki 昇 若月 Kazuji Kikuchi 一二 菊池 Masaki Yanai 雅紀 谷内 Sumio Yamada 澄夫 山田 Masaaki Ono 正明 小野 Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number JP2000143729A Other languages Japanese ( ja) Google Patents JP2001324332A - Piezoelectric gyro
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